Handbook of Silicon Based MEMS Materials and Technologies

Written By Markku Tilli
Handbook of Silicon Based MEMS Materials and Technologies
  • Publsiher : Elsevier
  • Release : 08 December 2009
  • ISBN : 9780815519881
  • Pages : 668 pages
  • Rating : 4/5 from 21 reviews
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Read or download book entitled Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli which was release on 08 December 2009, this book published by Elsevier. Available in PDF, EPUB and Kindle Format. Book excerpt: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
  • Author : Markku Tilli,Mervi Paulasto-Krockel,Veli-Matti Airaksinen,Sami Franssila,Veikko Lindroos,Ari Lehto,Teruaki Motooka
  • Publisher : Elsevier
  • Release Date : 2009-12-08
  • Total pages : 668
  • ISBN : 9780815519881
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Summary : A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies ...

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
  • Author : Markku Tilli,Mervi Paulasto-Kröckel,Matthias Petzold,Horst Theuss,Teruaki Motooka,Veikko Lindroos
  • Publisher : Elsevier
  • Release Date : 2020-04-17
  • Total pages : 1026
  • ISBN : 9780815519881
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Summary : Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, ...

Developments in Surface Contamination and Cleaning Methods for Surface Cleaning

Developments in Surface Contamination and Cleaning  Methods for Surface Cleaning
  • Author : Rajiv Kohli,Kashmiri L. Mittal
  • Publisher : William Andrew
  • Release Date : 2016-11-04
  • Total pages : 212
  • ISBN : 9780815519881
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Summary : Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods. This newest volume in the series discusses ...

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  • Author : Robin H A Ras,Abraham Marmur
  • Publisher : Royal Society of Chemistry
  • Release Date : 2016-11-21
  • Total pages : 391
  • ISBN : 9780815519881
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Summary : The objective of this book is to integrate information about the theory, preparation and applications of non-wettable surfaces in one volume. By combining the discussion of all three aspects together the editors will show how theory assists the development of preparations methods and how these surfaces can be applied to ...

Flexible Sensors for Energy Harvesting Applications

Flexible Sensors for Energy Harvesting Applications
  • Author : Anindya Nag
  • Publisher : Springer Nature
  • Release Date : 2022-10-03
  • Total pages : 212
  • ISBN : 9780815519881
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Summary : Download or read online Flexible Sensors for Energy Harvesting Applications written by Anindya Nag, published by Springer Nature which was released on . Get Flexible Sensors for Energy Harvesting Applications Books now! Available in PDF, ePub and Kindle....

Comprehensive Materials Processing

Comprehensive Materials Processing
  • Author : Anonim
  • Publisher : Newnes
  • Release Date : 2014-04-07
  • Total pages : 5634
  • ISBN : 9780815519881
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Summary : Comprehensive Materials Processing provides students and professionals with a one-stop resource consolidating and enhancing the literature of the materials processing and manufacturing universe. It provides authoritative analysis of all processes, technologies, and techniques for converting industrial materials from a raw state into finished parts or products. Assisting scientists and engineers ...

Advanced Materials Research Vol 1170

Advanced Materials Research Vol  1170
  • Author : Alan Kin Tak Lau
  • Publisher : Trans Tech Publications Ltd
  • Release Date : 2022-04-19
  • Total pages : 178
  • ISBN : 9780815519881
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Summary : This volume of the "Advanced Materials Research" journal includes papers reflecting research results in developing new materials and investigating their properties. The covered topics comprise assessment of the algorithm of surface defect classification in silicon wafer manufacturing, designing and simulation of a color-tunable light-emitting diode with two laterally arranged single ...

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Inkjet Printing in Industry
  • Author : Werner Zapka
  • Publisher : John Wiley & Sons
  • Release Date : 2022-10-10
  • Total pages : 1872
  • ISBN : 9780815519881
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Summary : A landmark reference on industrial-scale inkjet printing This handbook provides an indispensable overview of all essential aspects of industrial-scale inkjet printing. Inkjet printing, as a scalable deposition technique, has grown in popularity due to its being additive, digital, and contact-free. Given these advantages, the technology can now be used in ...

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Modern Trends in Materials Processing
  • Author : Sergey Bratan,Stanislav Roshchupkin
  • Publisher : Trans Tech Publications Ltd
  • Release Date : 2022-02-15
  • Total pages : 1184
  • ISBN : 9780815519881
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Summary : Selected peer-reviewed full text papers from the 5th International Conference on Modern Trends in Manufacturing Technologies and Equipment (ICMTMTE 2021)...

Semiconductor Manufacturing Handbook Second Edition

Semiconductor Manufacturing Handbook  Second Edition
  • Author : Hwaiyu Geng
  • Publisher : McGraw Hill Professional
  • Release Date : 2017-10-06
  • Total pages : 704
  • ISBN : 9780815519881
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Summary : Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, ...

Mems Nems

Mems Nems
  • Author : Cornelius T. Leondes
  • Publisher : Springer Science & Business Media
  • Release Date : 2007-10-08
  • Total pages : 2094
  • ISBN : 9780815519881
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Summary : This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of ...

Handbook of Diamond Technology

Handbook of Diamond Technology
  • Author : W. R. Fahrner
  • Publisher : Trans Tech Publication
  • Release Date : 2000
  • Total pages : 669
  • ISBN : 9780815519881
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Summary : This book is the result of twenty years of experience on the fabrication of active micro-cooling systems, the fabrication of electronic devices (radiation and magnetic sensors, transistors), the fabrication of optical devices (new green LED), and the adaptation of silicon simulation software to diamond. This includes the integration of the ...

Mems Nems

Mems Nems
  • Author : Cornelius T. Leondes
  • Publisher : Springer
  • Release Date : 2006-09-06
  • Total pages : 2094
  • ISBN : 9780815519881
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Summary : This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of ...

Handbook of Mems for Wireless and Mobile Applications

Handbook of Mems for Wireless and Mobile Applications
  • Author : Deepak Uttamchandani
  • Publisher : Elsevier
  • Release Date : 2013-08-31
  • Total pages : 640
  • ISBN : 9780815519881
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Summary : The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS ...

Manufacturing Engineering Handbook Second Edition

Manufacturing Engineering Handbook  Second Edition
  • Author : Hwaiyu Geng
  • Publisher : McGraw Hill Professional
  • Release Date : 2015-10-22
  • Total pages : 880
  • ISBN : 9780815519881
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Summary : The new edition of this professional resource reveals how to optimize all aspects of the global manufacturing process to build the highest quality goods at the lowest price in the shortest possible time. How can one apply technical and business knowledge to develop a strategic plan that delivers increased productivity, ...